PCD Dressers for Chemical Mechanical Planarization with Uniform Polishing

Abstract

Instead of attaching individual diamond grits to a metal substrate as all pad conditioners are made today, a revolutionary design by carving the structure out of a strong polycrystalline diamond (PCD) matrix. Such Advanced Diamond Disks (ADD) are manufactured by electro discharge machining (EDM) of PCD to form cutting pyramids of a specific size with a designed shape. ADD can produce a much higher density of pad asperities for polishing wafers at high efficiency and with high uniformity. This is a paradigm shift that low pressure CMP is not necessary to avoid damaging of delicate copper circuitry supported by ultra low dielectric constant material.