Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21
Online ISSN : 2424-3086
ISSN-L : 2424-3086
2007.4
Displaying 1-50 of 188 articles from this issue
  • Noriyuki KORETA, Hiroyuki SAKAI, Hiroaki EZAKI, Noriaki NAGAYOSI
    Session ID: 7A101
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The ball nose end milling technology has become widely used these days in many fields of machining parts. The demand for safety, reliability and service life is increasingly causing considerable attention to the surface integrity. However, the study of applications about surface integrity in this field has not yet been published in so many other reports. This research originated from following up the cause of cutting mechanism around the center of ball nose end mill. This study deals with Pre-hardened steel NAK55 mainly and die steel SKD11and clarifies surface integrity in not so severe cutting conditions.
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  • Takashi MATSUMURA, Yasuaki MIYAHARA, Takenori ONO
    Session ID: 7A102
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The dynamic response of small diameter tools is measured to simulate the dynamic cutting process in micro-scale milling. The inclined ball end mills are excited with measuring the exciting force on the vibration generator. The modal parameters are estimated with changing the cutter axis inclination and the overhang of the tool. A vibration model is presented to show that the vibration is subjected in the radial direction of the small diameter tool. The dynamic cutting process is simulated to show the effect of the spindle speed on the tool displacement based on the estimated modal parameters.
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  • Turnad L. GINTA, A.K.M. Nurul AMIN, A.N. Mustafizul KARIM, M. H. ISHTI ...
    Session ID: 7A103
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents an approach to optimize the surface finish in end milling titanium-alloy of Ti-6Al-4V using uncoated WC-Co and PCD inserts under dry conditions. Response surface methodology is utilized to develop an efficient mathematical model for surface roughness in terms of cutting speed, feed and axial depth of cut. For this purpose, a number of machining experiments based on factorial design of experiments method are carried out in order to determine surface roughness values. The 3FI surface roughness models have been developed at 95% confidence interval for both the inserts. The adequacy of the models has been verified by analyzing the variance.
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  • A.M.K. HAFIZ, A.K.M.N. AMIN, M.A. LAJIS
    Session ID: 7A104
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents the result of an experimental investigation on surface finish during end milling of AISI H13 hardened tool steel with PVD-TiAlN coated carbide and PCBN tool inserts. Mathematical models for the prediction of roughness have been developed in terms of cutting speed, feed and axial depth of cut by using Response Surface Methodology (RSM). Sufficient numbers of experiments were run based on the Central Composite Design (CCD) concept of RSM in order to generate roughness data. The adequacy of the models has been tested by analysing the variance. From the model it was found that feed plays the most dominating role on surface finish followed by cutting speed. However, axial depth of cut does not have significant effect on roughness value.
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  • Hiroshi MATSUDA, Hiroyuki SASAHARA, Masaaki FUKUDA, Masaomi TSUTSUMI
    Session ID: 7A105
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    A textural surface pattern is used to add a physical or decorative function to an object’s surface. We have proposed a milling technique involving patch division that can quickly generate a geometric surface pattern using a common profile-forming method. This report describes a method of generating a tool path using 3D-CAD and an FEA preprocessor applied to the patch division milling of a curved surface. Experimental results of the proposed method as applied to spherical and free-form surfaces are described.
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  • Safian SHARIF, Erween Abd. RAHIM, Amrifan Saladin MOHRUNI, Ashraf JAWA ...
    Session ID: 7A107
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents the investigation on the effect of edge geometry of PVD-TiN coated carbide inserts on the cutting performance and wear characteristics during face milling of titanium alloy, Ti-6246. Two similar PVD-TiN coated inserts with different edge geometry were tested at various cutting speeds with a feed of 0.1 mm/tooth. Results showed that edge geometry had a significant effect and sharp insert was observed to outperform chamfered (T-land) insert at all conditions. Excessive chipping and flaking at the cutting edge were the dominant failure modes on both tools under most conditions. In addition to adhesion, attrition and diffusion wear mechanisms, thermal cracks and plastic deformation were also observed on both tools.
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  • M.A. LAJIS, A.N. Mustafizul KARIM, A.K.M. Nurul AMIN, A.M.K. HAFIZ
    Session ID: 7A108
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents a study of the development of a surface roughness model in end milling of hardened steel AISI D2 using PVD TiAlN coated carbide cutting tool. The hardness of AISI D2 tool lies within the range of 56-58 HRC. The independent variables or the primary machining parameters selected for this experiment were the cutting speed, feed, and depth of cut. First and second order models were developed using Response Surface Methodology (RSM). Experiments were conducted within specified ranges of the parameters. Design-Expert 6.0 software was used to develop the surface roughness equations as the predictive models. Analysis of variance (ANOVA) with 95% confidence interval has indicated that the models are valid in predicting the surface roughness of the part machined under specified condition.
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  • Nandita HETTIARACHCHI, Toshimichi MORIWAKI, Toshiro SHIBASAKA, Keiichi ...
    Session ID: 7A109
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Circular vibration milling (CVM) has been proven capable of producing better surface finishes on difficult to cut materials. However, CVM process is far slower than conventional milling process. In circular vibration planing (CVP) process, the cutting tool is clamped without rotation and fed at a speed comparable to the feed speed of conventional milling. By superimposing circular vibration motion, necessary cutting speed could be achieved keeping the feed speed at realistic values. Inconel 718 was machined by CVM, CVP and conventional milling. It was observed that CVP could reduce tool wear and hence produce better surface finishes than conventional milling.
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  • Kamaruddin KAMDANI, Erween Abd. RAHIM, Safian SHARIF
    Session ID: 7A110
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper deals with experimental investigation on the performance of high speed drilling (HSD) on cutting force, torque, vibration, chip formation and surface integrity in drilling Ti6Al4V by uncoated carbide drills. The results show that cutting speed and feed significantly influenced the thrust force, torque and surface roughness value. Folded wavy type chips and curly type chips were produced under all tested cutting conditions. Furthermore, the transition from aperiodic to periodic chip formation occurred as the cutting speed increases. In addition, reduction of acceleration amplitude in peck drilling method significantly improved HSD performance. Significant microstructure deformations can be seen at all cutting conditions tested.
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  • Takeshi SHIINA, Libo ZHOU, Zhongjun QIU, Takeyuki YAMAMOTO, Jun SHIMIZ ...
    Session ID: 7B201
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    As finishing techniques for silica glass substrate, the free abrasive processes are able to offer a better surface roughness, but sacrifice profile accuracy. On the other hand, the fixed abrasive process or grinding is known as a promising solution to improve accuracy of profile geometry, but always introduces damaged layer. In order to simultaneously achieve both surface quality and profile accuracy, this research has proposed a novel chemo-mechanical-grinding (CMG) process by effective use of chemical reaction in the grinding process.
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  • Yoshiaki Tashiro, Masaaki Kenmochi, Soitani, Tatsuya Tsuruga, Zhou, ...
    Session ID: 7B202
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The results obtained so far show that the surface quality of silicon wafers ground by CMG (Chemo-Mechanical-Grinding) is equivalent to that of CMP (Chemical & Mechanical Polishing) wafers, in terms of surface roughness, dislocations, residual stress, oxides contaminations and crystallinarity. The objective of this study is to develop CMG wheels with higher performance. In order to optimize the contents of CMG wheel, the removal rate was investigated on the basis of four-factors ( the effect of shape, composition, agent and pore ) with two-level full factorial design of experiment.
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  • Ryunosuke SATO, Yoshio ICHIDA, Yoshitaka MORIMOTO, Kenji SHIMIZU
    Session ID: 7B203
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    To examine the polishing characteristics of the manganese oxide slurry, a series of polishing experiments for oxygen free copper have been carried out by using MnO2, Mn2O3 and Al2O3 as abrasive grains. As a result, the best result among three kinds of slurries is obtained in polishing with Mn2O3 slurry at the viewpoints of the stock removal and surface roughness. Furthermore polished surfaces have been analyzed using SEM and atomic force microscope. While a large number of mechanical scratches are observed in the polished surface with Al2O3 slurry, the polished surfaces with manganese oxide slurries are covered with fine protrusions. It seems that the fine protrusions result from interaction between mechanical and chemical effects.
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  • Hiroshi ISHIZUKA, Marehito AOKI, James C. SUNG, Michael SUNG
    Session ID: 7B204
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Instead of attaching individual diamond grits to a metal substrate as all pad conditioners are made today, a revolutionary design by carving the structure out of a strong polycrystalline diamond (PCD) matrix. Such Advanced Diamond Disks (ADD) are manufactured by electro discharge machining (EDM) of PCD to form cutting pyramids of a specific size with a designed shape. ADD can produce a much higher density of pad asperities for polishing wafers at high efficiency and with high uniformity. This is a paradigm shift that low pressure CMP is not necessary to avoid damaging of delicate copper circuitry supported by ultra low dielectric constant material.
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  • Yoshihiro KITA, Kiku IKOKU, Xiaojun WU
    Session ID: 7B206
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    High accurate intelligent polishing technique on free form surface by grinding center with elastic ball type wheel has been developed. In the process, same CL (cutter location) used in cutting process is applied effectively and only cusp height generated in cutting process is removed. Therefore, polishing can be conducted keeping the form accuracy. generated in cutting process. This technology will be helpful in polishing of die and mold, which contains many free surfaces
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  • Choung-Lii Chao, Wen-Chen Chou, Ta-Tung Chen, Chung-Woei Chao
    Session ID: 7B207
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Diamond, having many advanced physical and mechanical properties, is one of the most important materials used in the mechanical, telecommunication and optoelectronic industry. It has played an important role for being advanced materials of MEMS devices. In this present study, reactive ion etching (RIE) polycrystalline CVD diamond film was conducted. The etching gases such as O2, O2 / CF4, and O2 / SF6 were used in the RIE experiments. Experimental results showed that using O2 can obtained rough etched surface where have uniform and densely sub-micro pillar-like structure formed on the diamond grains. From the Raman spectra analysis and TEM micrographs showed that the etched diamond film surfaces were transformed into graphite and amorphous carbon. In addition to the atmospheric pressure air plasma (APAP) pretreatment was also conducted before RIE process. Using the APAP process seems can help to obtain some cauliflower-like and sub-micro cone-like structures on the RIEed/O2 surface. Although RIEed and APAP/RIEed diamond films exhibited similar surface modified layer, their surface morphologies showed very different.
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  • Masahiko MIZUI, Yoshio MIZUGAKI, Koichi KIKKAWA, Keisuke KAMIJO
    Session ID: 7B208
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    As for mold manufacturing, quick supply and reduction of costs are demanded to product of many models in small quantities. Handiwork is general in final polishing. (Feed mark, surface of electro-discharge machining) The problem in handiwork is a thing that working hours and working accuracy influenced by experience. In this research, the polish that assists ultrasonic vibration is studied. Cavitations generated by Ultrasonic vibration eliminate polishing-chips that is cause of loading. The target of this research is suppressed of loading that assisted by ultrasonic vibration.
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  • Tetsuya TASHIRO, Junsuke FUJIWARA
    Session ID: 7B210
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    C/C-SiC composite was ground with SD400 and SD4000 grinding wheel. The grinding forces of the SD4000 were bigger than that of other grinding wheels and some cracks were observed on the ground surface. There was severe loading on the SD4000 wheel. In case of the SD400 wheel, three types of grinding wheels which had different concentration were used. There were some places where the depth of cut was bigger than the set value of the depth of cut in the concentration 150. The SD400 wheel of the concentration 50 was suitable among the SD400 wheels from the point of the cost.
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  • Takazo YAMADA, Hwa-Soo LEE, Hayato TSUYUKI
    Session ID: 7B211
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    In this study, in order to remove the surface damaged layers and to shorten the grinding time, a principle of designing method of optimum grinding cycle is proposed. This optimum grinding cycle consists of two infeed processes and one spark-out process. In the first infeed process, depth setting is settled larger than one of usual grinding process. In the second infeed process, in order to remove damaged layers generated in the first infeed process, depth setting is settled smaller than previous process.
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  • M. KONNEH, S. IZMAN, A. R. ALAO, AFZERI, M. MUHAMAD, M. ROZAIDI
    Session ID: 7B212
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Much effort has been made in machining hard and brittle materials. However, less attention is paid to the amount of coolant that contributes to generating ductile streaks especially when machining small areas on brittle materials like silicon. This paper presents partial-ductile grinding of mono-crystalline silicon using 64 μm resinoid-bonded diamond mounted pins on conventional MAHO NC vertical Milling machine. Ground work-pieces were examined both qualitatively and qualitatively. Evaluations of the results reveal condition of optimum flow rate where minimal micro fractures occurred and indicating surface finish as low as 30 nm. Interrelationship between machining parameters is also established
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  • Fusaomi NAGATA, Tetsuo HASE, Zenku HAGA, Masaaki OMOTO, Keigo WATANABE
    Session ID: 7C301
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Control of robotic mold polishing is considered in this paper. CAD/CAM-based position/force controller that simultaneously performs stable force control and exact pick feed control along curved surface is presented for industrial robots. The force feedback loop controls the polishing force consisting of the contact force and kinetic friction force. During mold polishing, the position feedback loop has a delicate contribution to the force feedback loop in Cartesian space so that the abrasive tool doesn’t deviate from the desired trajectory and keeps a constant pick feed. When a mold polishing robot with the controller runs, cutter location (CL) data with normal vectors are used for not only a desired trajectory of tool translational motion but also desired contact directions given to a mold. The CL data allow the robot to realize a complete non-taught operation of the position and contact direction. In this paper, a simple experiment is conducted by using an industrial robot with a ball-end abrasive tool in order to evaluate the effectiveness of the proposed method. The target workpiece is an aluminum PET bottle blow mold after NC machining, whose curved surface has small cusp marks with about 0.3 mm height every pick feed. The results show that the proposed mold polishing robot with the CAD/CAM-based position/force controller can uniformly remove the cusp marks and further achieve mirror-like surface quality without undesirable over-polishing.
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  • ( In Case of CP Control )
    Michihiro HAYASHI, Hiroshi TACHIYA, Naoki ASAKAWA, Yutaka MATSUBARA
    Session ID: 7C302
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This study proposes a method for suppressing the torques of the manipulators, with considering the effect of inertial forces in order to achieve the power-saved drive. The present study generates the trajectories, which here reveal time profiles of positions, velocities and accelerations of the entire path of the output point of manipulators. The trajectories of manipulators are introduced by determining both the initial position and motion curves for the entire path. This study expresses the motion curve as a polynomial and determines its coefficients. The initial pose and unknown coefficients are decided by a heuristic algorithm to achieve powersaved drive. As such problems have non-linearity and multi-peak solutions, it is difficult to find out the optimum one. Thus, this study uses a heuristic algorithm “SHA” to determine the appropriate motions of manipulators, because the heuristic algorithm is, as well known, an effective solution for such complicated problem. This study determines the optimal motions of the PUMA560 comprising spatial 3 degrees-of-freedom by the proposed method, and verifies its availability.
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  • Jiang ZHU, Ryo SUZUKI, Tomohisa TANAKA, Yoshio SAITO
    Session ID: 7C303
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    In this paper, a surface sculpturing system based on 8-axis robot is proposed, the CAD/CAM software and tool path generation algorithm for this sculpturing system are presented. The 8-axis robot is composed of a 6-axis manipulator and a 2-axis worktable, it carves block of polystyrene foams by heated cutting tools. Multi-DOF robot benefits from the faster fashion than traditional RP (Rapid Prototyping) methods and more flexibility than CNC machining. With its flexibility driven from an 8-axis configuration, as well as efficient custom-developed software for rough cutting and finish cutting, this surface sculpturing system can carve sculptured surface accurately and efficiently.
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  • Mamoru HAYASHI, Hayato YOSHIOKA, Hidenori SHINNO
    Session ID: 7C305
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    High performance in-process status monitoring sensors are important devices to build an intelligent machine tool for ultraprecision machining. However, it is particularly difficult to monitor machining status during an ultraprecision machining because physical behaviors around the cutting point are extremely small to measure. We proposed a micro-sized thermometry-type in-process sensor which is mounted directly on the rake face of the tool tip nearby the cutting edge. The developed sensor could monitor changes of the cutting condition during a cutting process. Furthermore, the developed sensor could be applied for an adaptive control of ultraprecision machining. The results confirmed the sensor has a remarkable performance.
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  • Ryuta SATO, Daisuke ENDO, Masaomi TSUTSUMI
    Session ID: 7C306
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper describes the motion control techniques of rotary tables for the 5-axis machining centers. In the 5-axis machining centers, various causes of inaccuracy exist in the rotary tables. In this study, the causes of inaccuracy are investigated. As the result, it is clarified that the main causes of inaccuracy: servo response, fluctuation of rotational velocity, backlash and the signal delay of rotary encoder. Motor torque saturation of the rotary axis also yields a problem. Based upon the investigated results, some compensators for the problems were proposed. It is clarified that the proposed compensators can much improve the synchronous accuracies.
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  • Soichi IBARAKI, Takuya SHIMIZU, Atsushi MATSUBARA
    Session ID: 7C307
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Numerous researches have been reported in the literature on the cutting force control in end milling processes. There have been, however, very few practical applications actually employed in commercial products. In this research, as a practically feasible and effective cutting force control scheme, we propose a long-term cutting force control strategy with a particular focus on the regulation of the tool life. First, the cutting force is monitored only at every “check point” set on the tool path. Since it does not require continuous full-time monitoring of cutting forces, a “cheaper” estimation scheme of cutting forces can be potentially employed. During actual cutting, the feedrate profile is updated at every check point, such that the cutting force is regulated along the target profile. The target profile is given such that the desired cutting distance can be machined before reaching the end of tool life. The effectiveness of the present approach is experimentally investigated by cutting experiments of hardened steel.
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  • Tetsuya NARUSE, Kazu ANDOU, Yutaka KAMEYAMA, Masayoshi MIZUTANI, Yoshi ...
    Session ID: 7C309
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.
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  • Jun SHIMIZU, Takashi TSUMURA, Yumetaka SUEHISA, Libo ZHOU, Hiroshi EDA
    Session ID: 7C310
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This study aims to clarify the silicon wafer grinding mechanism by a diamond wheel at nanometer level to support the estimation of grinding conditions for minimizing the surface defect, for maximizing the removal rate and so on. In this paper, several nanoscratching experiments using an atomic force microscope (AFM) were conducted on a silicon wafer workpiece by a diamond abrasives and a sharpen diamond probe under various machining and environmental conditions. As a result, the transcription of diamond tool locus and the influence of the temperature on material removal process were clarified.
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  • LIU Yong, HAO Shang-hui, HAO Ming-hui, Li De
    Session ID: 7D401
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    A novel signal processing method based on calibration is present in this paper to improve the resolution of quadrature encoder. A radial magnetizing ring alnico is adhered to rotor of motor, while six Hall ICs are placed around the alnico evenly. magnetic filed produced by the alnico can be sensed. Quadrature encoder is calibrated previously to get the table using a higher resolution optical encoder off-line. A quadrature encoder is designed and its resolution can achieve to 13-bits. Structure is very simple and cost is very low compare with an optical encoder. It can be used in unfavorable environment where a high-accuracy position detecting must be realized.
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  • Jizhu Liu, Shuanghui Hao, Minghui Hao, Baoyu Song
    Session ID: 7D402
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Additional inertial force will cause the deformation of some parts when 3D-coordinate Measuring Machine (CMM) runs quickly. It will result in the difference between real results and reading of raster sensor, that is, dynamic error will be produced. This paper presents the theoretical model of CMM dynamic error compensation. The Z-direction deformation of crossbeam is analyzed based on Ansys, one kind of finite element simulation software, when slide carriage is in different position under three different load conditions (accelerating, uniform speed, decelerating). Dynamic error compensation model is acquired under any kind of load according to the analysis results, which can improve the measuring accuracy of CMM greatly.
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  • Tadao KAWAI, Yuichi MIZUTANI
    Session ID: 7D403
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    In this paper, we developed a tool holder with torque sensing function in it by using a magnet coupling with magnetoresistance sensors. Cutting torque twists a tool holder against a tool chuck through a magnet coupling. We can estimate torque by estimating amount of twist. Unfortunately errors in machining and assembly of a tool holder degrade an accuracy of torque measurement. We estimated an effect of manufacturing on a measurement error and developed a technique to compensate manufacturing errors. We checked its accuracy by comparing its output signal with a torque sensor provided by Kistler. Finally we confirmed that the developed tool holder with sensing function showed almost same accuracy as a torque sensor provided by Kistler.
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  • Masaaki. NAKAZAWA, Yasuhiro. KAKINUMA, Tojiro. AOYAMA
    Session ID: 7D404
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Micromachining process is effective to manufacture various micro patterns on a micro glass chip which is used for μ-TAS because of possibility for 3D shaping, accurate and fast production and low environment impact compared with chemical one. However the positioning of the edge against the glass workpiece surface is a problem in cutting process. A special technology applying the total internal reflection of a laser beam was proposed to detect the contact of the edge to the surface. The contact was successfully detected with high sensitivity and the cutting depth could be measured in process by using the method.
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  • Kazuhiro TSURUTA, Kazuya SATO, Takashi FUJIMOTO, Nobuhiro USHIMI
    Session ID: 7D406
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    In the machine tool industry and the semiconductor manufacture fields, the necessity of high precision and fast response for NC machines is rapidly spreading. In general, it is well known that a positioning control system contains nonlinear friction force, it may cause a serious disadvantage on control performances such as tracking errors, limit cycles and undesired stick-slip motion at very low motion velocity. In order to achieve the high level control performance, the frictional effects have to be removed. In this paper, we proposed a novel PID control method which is based on the idea of sliding mode control for nonlinear friction compensation in a table drive system. Experimental results are given to show the effectiveness of our proposed PID control method compared with the conventional PID method. Especially, the tracking error of our proposed PID control was reduced by more than 2/3 compared to the case of the conventional PID control at the end of a stroke.
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  • Toshimichi GOKAN, Hayato YOSHIIOKA, Hidenori SHINNO
    Session ID: 7D407
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Positioning table systems applied for the field of nanotechnology require achieving a nano-scale motion control, a high speed drive and a compact structure. In order to meet such requirements, it is necessary and indispensable to develop a new nano-positioning table system. In this study, therefore, a compact nanometer positioning table system with a squeeze bearing was newly developed. The developed table system was integrated with a linear motor and a squeeze bearing. In addition, the levitation characteristics of the bearing and the positioning performance were evaluated. Experimental results confirmed that the developed table system has remarkable performance.
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  • Motohiro TAKAHASHI, Hayato YOSHIOKA, Hidenori SHINNO
    Session ID: 7D408
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    In recent years, requirements for nano-positioning have been increased in order to enhance ultraprecision machining capability. In particularly vertical nano-positioning has been required to meet suchdemand. This paper proposes a vertical nano-positioning system which has an innovative structure witha gravity compensator. The developed system consists of linear motor and aerostatic guideway, andtherefore, the moving stage is in perfectly noncontact condition. The moving stage is verticallysupported by the gravity compensator with a vacuum cylinder. In addition, performance evaluation ofthe developed system was carried out through a series of nano-positioning experiments. The evaluationresults confirmed that the developed system has a remarkable performance suitable for applicationsrequiring vertical nano-positioning control.
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  • Dong-Mok LEE, Sekar MOHAN, Seung-Han YANG
    Session ID: 7D410
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The need to achieve maximum productivity in high speed machining of parts with complex profiles designed by NURBS is increasing. For interpolating NURBS tool paths, different parametric interpolators are proposed and curvature dependent adaptive interpolator is more promising among them. Even though adaptive interpolation follows maximum feed-rate at larger times leading to better utilization of machine capability, problems with machine dynamics still exist. In this paper a new method using minimum travel time is proposed to compute a smooth trajectory satisfying both chord error and machine dynamics without the need of look-ahead algorithms. Simulation results compared with adaptive interpolator show feed rate profile satisfying velocity, acceleration and jerk limits and chord error with optimized time.
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  • Xiaoyou ZHANG, Tadahiko SHINSHI, Akira SHIMOKOHBE, Yoshihito IMAI, Hid ...
    Session ID: 7D411
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The object of this study is to realize high-speed electrical discharge machining (EDM) using a wide-bandwidth, high-precision, millimeter-stroke, 5-DOF controlled maglev local actuator. In this paper, we report on the EDM of small holes using this actuator, and discuss the relationships between machining speed, the bandwidth of the actuator and the control gain of the EDM system. The experimental results show that the machining speed using the actuator was improved as the bandwidth of the actuator and control gain of the EDM system increased.
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  • Muhammad Aziz, Osamu OHNISHI, Hiromichi ONIKURA, Nuraslina Sharkawi, W ...
    Session ID: 7E501
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The research deals with the development of micro compound tool consisting of a micro flat drill as a drilling part and a micro electroplated diamond grinding part for finishing. The study focuses on the fabrication method of these micro compound tools and their application in making and finishing holes into stainless steel (SUS304). From the experiment, it was found that there is an optimum drill point angle which results in a minimum burr formation including entrance and exit burr. Furthermore, ultrasonic vibration during machining could improve the performance of micro compound tool by decreasing the machining force.
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  • Ahmad SHARIFUDDIN, Hiromichi ONIKURA, Osamu OHNISHI, Heung-Kil PARK
    Session ID: 7E502
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The grooving performances of fabricated micro diamond grinding tool with a diameter of 115 μm on hard and brittle materials were studied. Micro diamond with grit size of 2 to 4 μm was used to fabricate the grinding tool by electroless nickel-phosphorus (Ni-P) composite plating. Here, by using the fabricated tools we try to investigate the machinability in grooving of each workpiece; single crystalline silicon and quartz glass in the aspect of feed rate and grinding speed to the tool life.
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  • Heung-Kil PARK, Hiromichi ONIKURA, Osamu OHNISHI, Ahmad SHARIFUDDIN
    Session ID: 7E503
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This research deals with the development of micro grinding tools fabricated by electroless Ni-P composite plating with 5-10μm sized diamond grits and micro grinding. In this study, the fabrication of micro grinding tools for the grit amount was investigated and two kinds of tools were fabricated. The tools were used to micro grooving or drilling. Grooving with a groove depth of 100μm could be performed to about 600mm on silicon. Also micro drilling was possible in silicon, quartz glass and metallic glass.
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  • Masahiko SATO, Hisataka TANAKA
    Session ID: 7E504
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    The tool tip temperature in end milling was measured using a two-color pyrometer with optical fibers. The infrared rays radiated from the tool tip were accepted by the optical fiber inserted in the tool insert . They were led to the pyrometer connected by the fiber coupler that transmits the rays outside the machine tool. In up-milling, the temperature continuously increases as the cutting proceeds and peaks at the end of the cutting. In down-milling, the temperature increases as the cutting proceeds and peaks in the middle of the cutting. The supply of oil mist reduces the temperature of tool insert.
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  • TAKAHASHI Satoshi, MIZUMOTO Hiroshi, ARII Shiroh, YABUYA Makoto
    Session ID: 7E506
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    A new type of touch probe for measuring small optical parts is proposed. The probe is excited by a piezoelectric actuator in sinusoidal waveform. When the probe touches an object, harmonic components of the excitation appear in the power spectrum of the probe vibration. It is judged that the probe touches the object at the power of the second harmonic exceeds a threshold level. The touch probe is mounted on a small CMM and evaluated its performance by measuring standard steel balls.
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  • Akinori INADA, Wei GAO
    Session ID: 7E507
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Profile measurement of a scroll compressor is importantfor improving compression efficiency. This paperdescribes the height profile measurement of a scroll compressor in the manufacturing line using aprototype measurement system. A commercial CMM is also employed for comparison. The measurementrepeatability of the height profile by the prototype measurement system is under 1 μm, which satisfy therequirements from the manufacturing line. Through compensation of the tilt component, result of theprototype measurement system is in a good corresponding with that of the commercial CMM.
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  • Chana Raksiri, Thitipoom Dorkyor
    Session ID: 7E508
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This research proposes a new application of Michelson laser interferometer for roundness measurement. Michelson laser interferometer is the high precision length measurement in the resolution of one nanometer. The optical setup is described and the theory is derived. This measurement system composes of laser interferometer, a single-axis rotary table and a glass hemisphere. The roundness of glass hemisphere is the result of this experiment where are located and rotated by single-axis rotary table. A laser interferometer reflector mirror is placed on moving slide which can move along the glass hemisphere surface. The displacement of reflector along glass hemisphere results to the radius of glass hemisphere at each sampling angle. The uncertainly of this system is determined from the laser interferometer uncertainty, rotary table uncertainty and environment. Experimental results show that the roundness, refer to The Japan International Standard (JIS) roundness measurement result of the glass hemisphere is 0.223 μm and measurement uncertainty ± 0.0814 μm. The roundness of this glass hemisphere from convectional method is 0.06 μm. Experiment results show the proposed approach can be applied for roundness measurement.
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  • Sachiko OGAWA, Eiichi AOYAMA, Toshiki HIROGAKI, Yoshiaki ONCHI
    Session ID: 7E510
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    We have developed a new low pressure method for obtaining a finer finish in super-finishing using diamond abrasive stones. This is a finer finish with very small stock removal, than ordinarily occurs in a conventional process using aluminum oxide or silicon carbide stones. Super-finishing was attempted using low pressures (less than 0.5 MPa) with diamond abrasives averaging less than 3 μm in diameter. As a result, we could obtain nano-order surface finishes with depth of cut control of sharp diamond edge.
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  • P.L. Tso, C. H. Chen, C. Y. Shih
    Session ID: 7E511
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Sintered polycrystalline diamond (PCD) compacts are normally used for cutting tools, drill bits and wire dies. A novel application of PCD has been developed to use its entire surface carved to create different patterns which are triangle or square shape loaded with leveled millers that can shave brittle materials in ductile mode. Due to numerous cutting edges formed on the same level of PCD shaver, which can be used to thin the wafer surface to achieve both flatness and smoothness of the industrial requirements. SEM has been used to observe the surface and subsurface of the thinned wafer surface. The critical depth of cut between ductile and brittle cutting mode is close to 2 μm in this thinning operation. The damaged layers of machined surface have been observed and studied in this paper.
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  • M.A. Rahbary
    Session ID: 7F601
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    One of the most important processes in manufacturing engineering parts is on-line dimensional measurement and quality assurance process. Dimensional measurement techniques using common devices such as various micrometers and mechanical devices are very common in small and medium sized manufacturing companies. These devices are not very accurate especially when are used to carry out high quantity dimensional quality checks on-line, for measuring parts tolerances for example, and by experience, they can produce many errors. The paper looks into the structure of a simple and effective measurement device which implements a design and development method to devise an electronic and software based measurement system with accuracy of one micron. The system uses a single distance measuring laser sensor and a V-based block, for measuring external diameters of shafts which can easily be used on-line. A purpose build software system then receives the raw data from the device and carries out various operator required analysis on the data. Design techniques as well as input and output characteristics of the system are discussed.
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  • Sande GAO, Atsushi Atsushi KATO, Xiaochu TANG, Xue CHEN, Jing LI
    Session ID: 7F602
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Reverse engineering is an effective method applied to development of many kinds of products. This research dealt with reverse engineering for a product with free-form surfaces. Firstly, general procedure of reverse engineering was surveyed. Secondly, as an example, computer aided design and manufacturing of a lure and its die casting mould were carried out based on reverse engineering, in which the three-dimensional data was gotten from photos of the lure. Finally, some results and considerations were summarized.
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  • Masayuki FUKURA, Eiichi AOYAMA, Toshiki HIROGAKI, Keiji OGAWA, Nobe HI ...
    Session ID: 7F603
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    Herein, we investigate reverse engineering using116 the photometric stereo method. The advantage of RE is that the designer can easily design complex shapes and shorten the design time. While RE using the photometric stereo method is cheaper and faster than almost any other measurement method, it is less accurate than other methods. In the present study, by varying light location and shutter speed of the camera, we examine the photographic condition in which we can acquire the most optimum output data. As a result, we obtain the best photographic condition to acquire the optimum output data.
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  • Yusuke Yusuke UCHIDA, Hideki AOYAMA
    Session ID: 7F605
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents an automatic database construction system of machining know-how for automatically outputting advanced NC programs from CAM (Computer Aided Manufacturing) systems. A problem of existing CAM system is that NC programs do not consider not only differences in cutting conditions such as machine tools, but also taste of experienced engineers. To solve this problem, this study proposes a system to construct a database which hierarchically organizes cutting blocks, machining features, cutting methods and cutting conditions by downloading the machine tool control parameters via the Internet and NC programs which are popular at the manufacturing site.
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  • Afzeri, M. Konneh, A.G.E. Sutjipto, Yulfian A.
    Session ID: 7F606
    Published: 2007
    Released on J-STAGE: August 25, 2020
    CONFERENCE PROCEEDINGS FREE ACCESS
    This paper presents the hybrid optimization algorithm to obtain an optimum clamping configuration of pin type fixture. Genetic and Particle Swarm Optimization (PSO) algorithms are utilized serially for determining the minimum workpiece deformation. Pin fixture with array arrangement in two opposite side supports the workpiece through clamping and friction force. Deformation and friction slip are predicted by simulation of pin-workpiece clamping model and analyzed by Finite Element methods. Maximum deformation and slip condition are evaluated by building the parametric script of the model. Parameters of the model is assigned by the algorithm through iteration process. Satisfies clamping arrangement to minimize the deformation and prevent the slip is evaluated using GAs to arrange the pin configuration. PSO is further applied based on the result of GAs for obtaining the best workpiece position. Result of the evaluation shown that the optimization using two algorithms could achieve the beter position and clamping configuration.
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