Consistent Processing and Measurement Procedure on Micro Cutting

Tetsuya NARUSE; Kazu ANDOU; Yutaka KAMEYAMA; Masayoshi MIZUTANI; Yoshihiro UEHARA; Kazutoshi KATAHIRA; Weimin LIN; Chikako SASAKI; Hitoshi OHMORI

doi:10.1299/jsmelem.2007.4.7C309

2007.4

Session ID : 7C309

DOI https://doi.org/10.1299/jsmelem.2007.4.7C309

Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : November 07, 2007 - November 09, 2007

Consistent Processing and Measurement Procedure on Micro Cutting

*Tetsuya NARUSE, Kazu ANDOU, Yutaka KAMEYAMA, Masayoshi MIZUTANI, Yoshihiro UEHARA, *Kazutoshi KATAHIRA, Weimin LIN, Chikako SASAKI, Hitoshi OHMORI

Author information

*Tetsuya NARUSE
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Kazu ANDOU
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Yutaka KAMEYAMA
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Masayoshi MIZUTANI
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Yoshihiro UEHARA
V-CAD Fabrication team, RIKEN (The Institute of Physical and Chemical Research)
*Kazutoshi KATAHIRA
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Weimin LIN
V-CAD Fabrication team, RIKEN (The Institute of Physical and Chemical Research)
Chikako SASAKI
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)
Hitoshi OHMORI
Materials Fabrication Laboratory, RIKEN (The Institute of Physical and Chemical Research)

Keywords: Micro cutting, Desk-top machine tools, Micro tool, Micro mechanical fabrication

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.

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