Micro Deformation of Probe by Polarized Laser Irradiation and its Application to Sub-micron Positioning

Abstract

Sub-micron expansion process of micro-bar such as probes has been observed when irradiated by a polarized Ultra Violet (UV) laser. Influences of laser polarization, laser fluence, micro-bar size, its crystallographic orientation and heat have been investigated. It could show that the expansion is not influenced by a thermal cause, rather, suggested that the cause comes from the change of crystal lattice distance.