Dynamic Characteristics and Positioning Performance of Piezoactuator–integrated Ball Screw Drive

Abstract

This paper presents a new fine and coarse (dual) positioning system with a piezoelectric actuator integrated into the support unit of a ball screw. On the developed system, frequency response tests were carried out and a dual controller was designed. By using this dual positioning system, positioning tests were carried out. Test results show that the positioning system has good tracking capability with a tracking error of less than 0.2 µm by decreasing the stick motion.