Effect of ELID Grinding on Conductive Rubber-Bond Wheel

Yuji HASEGAWA; Nobuhide ITOH; Goroh ITOH; Hitoshi OHMORI; Teruko KATOH; Akihiko NEMOTO; Takashi MATSUZAWA; Hiroshi MIZOGUCHI

doi:10.1299/jsmelem.2007.4.8E513

2007.4

Session ID : 8E513

DOI https://doi.org/10.1299/jsmelem.2007.4.8E513

Conference information

Host: The Japan Society of Mechanical Engineers

Name : [in Japanese]

Date : November 07, 2007 - November 09, 2007

Effect of ELID Grinding on Conductive Rubber-Bond Wheel

Yuji HASEGAWA, Nobuhide ITOH, Goroh ITOH, Hitoshi OHMORI, Teruko KATOH, Akihiko NEMOTO, Takashi MATSUZAWA, Hiroshi MIZOGUCHI

Author information

Keywords: ELID grinding, Conductive rubber-bond wheel, Grinding characteristics, Mirror surface

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

We developed a conductive rubber-bond grinding wheel for ELID grinding. The grinding wheel is composed of rubber, carbon, and abrasives, and was designed to demonstrate ELID effects (continuous grinding ability) by the excellent finishing effects of rubber and conductivity ensured by carbon. The prototyped grinding wheel was a #1200 conductive rubber-bond grinding wheel using Al₂O₃ abrasives. Grinding experiments of mono-crystalline silicon were carried out using this grinding wheel, and it was found that stable grinding without loading could be realized by adding ELID grinding.

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