Development of a micro-fabrication process for micro devices

Abstract

This paper proposes new micro fabrication processes of metallic materials by combination of nano plastic forming, plating and polishing. The process is separated into 5 steps; nano plastic forming, nickel plating, peeling, polishing, and picking up. Three kinds of metallic structures were fabricated by combination of these steps; micro structured foil, micro composite surface structure, and miniature mechanical parts. Each step was tested experimentally in the paper. It was confirmed that the proposed processes are useful to manufacture various kinds of micro devices.