Determination method of removal threshold in laser ablation considering laser intensity distribution

Abstract

Formerly, the removal threshold with laser ablation was determined based on the relationship between the averaged laser intensity and the removed width. However, since this value changes according to the irradiation conditions, the application of this value was limited within the narrow range of irradiation conditions. In this paper, the novel method to determine the ablation threshold is proposed in order to make the threshold possible to apply independent of the optical system and laser irradiation conditions. To achieve this purpose, the simplified ablation model with the consideration of the laser intensity distribution is introduced, and then, the validity of the model is clarified experimentally. Furthermore, the estimation method of the ablation characteristics is proposed based on the model.