Abstract
Fabrication of micromechanical structure using self-assembled particles was proposed. Patterned substrate is drawn up from a suspension containing polystyrene (PS) particles, which have a diameter of 1μm. The particles are autonomously assembled on only the hydrophilic regions. These particles are thermally adhered to each other by annealing at 200 degrees centigrade. The underlying SiO_2 layer is dissolved by chemical etching of HF solution. Some line parts of PS particles forms micro-cantilevers successfully. The length and width of micro-cantilever is about 300μm and 50μm, respectively. These results indicate that this process is utilized for fabricating micro-cantilever sensor.
