Abstract
In the laser scribing, when a median crack was produced without damage, such processing conditions were defined as suitable. Defining two kinds of damage, we investigated dominant factors of the range of suitable conditions by conducting thermoelastic analyses based on results of a laser scribing experiment and the photoelastic observation. Obtained conclusions are as follows: Generation of damage is dominated by the magnitude of the residual stress induced by the shear stress. Formation of a median crack is dominated by the maximum value of the tensile stress generated perpendicularly to the surfaces of a median crack.