Abstract
Micro-grinding is one of the methods to create submillimeter-structures, and is required to improve ground surface roughness. Slant feed grinding is a machining method to improve ground surface roughness, but the improving mechanism has not been clarified yet. This paper proposed a theoretical method for calculating ground surface roughness of slant feed grinding using a statistical approach. A self-developed micro-grinding device was then employed to confirm the calculation method experimentally.
