Abstract
Microfabricated structures continuing to shrink with development of nano-technology, an inspection technology which can be applied to sub-micrometer features is getting important. A super-resolution inspection method beyond the diffraction limit using the structured light shifts is one of the potential inspection techniques. In this article, in order to expand the application of this optical super-resolution inspection method to coherent imaging condition, a novel coherent imaging algorithm based on the special three-light-flux standing wave structured light was proposed. Numerical simulation analyses confirm that proposed method can be applied to coherent imaging condition such as general microstructured surface.
