A015 Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates

Teppei ONUKI; Ippei MURAYAMA; Takeyuki YAMAMOTO; Hirotaka OJIMA; Jun SHIMIZU; Libo ZHOU

doi:10.1299/jsmelem.2013.7.67

2013.7

Session ID : A015

DOI https://doi.org/10.1299/jsmelem.2013.7.67

Conference information

A015 Control of the incubation effects in pulsed laser micro machining on ferroelectric lithium niobate substrates

Teppei ONUKI, Ippei MURAYAMA, Takeyuki YAMAMOTO, Hirotaka OJIMA, Jun SHIMIZU, Libo ZHOU

Author information

Keywords: Micro processing,, Laser ablation, Incubation effect, Lithium niobate, Multiphoton process

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

Incubation effects in the material removal and the surface integrity of LN are investigated for damage-free, precious steric micro processing from the results of preliminary micro processing experiments of laser ablation via the multi photon process with controlled incubation effects in scanning laser multi pulse shots. Advisable process conditions are larger N and smaller for control of the incubation effects.

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