1203 High-quality and Reliable Removal Method of ZnO by ns Pulsed Fiber Laser with Square Core Optical Fiber

Abstract

Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.