抄録
Linear ultrasonic motors have been formerly designed by trial and error of designers. Therefore, the geometry of the vibrator for these linear ultrasonic motors is generally limited to simple one. The output power of the linear ultrasonic motor is not maximized by optimization for designing the geometry of the vibrator. In the present study, a linear ultrasonic motor having high power is designed using optimum geometry design method. The design method is based on a contact analysis between slider and vibrator, finite element method and genetic algorithms. The designed vibrator is manufactured and the characteristics of the motor are measured. As a result, measured natural frequencies of the vibrator agree well with the calculated ones. The maximum unloaded velocity and maximum thrust are 300 mm/s and 1.96N at the driving voltage to be 30V and the pre-load to be 4.58N, which are larger than those for previously developed linear ultrasonic motors.
