抄録
In the present invited paper, the activities of my recent research in the fields of micro systems, i. e., miniature mechanisms, micro mechanisms, and nano-meter-order manufacturing are reported, especially, concerning (1) Micro bonding system, (2) Micro mechanism and its element manufactured by Reactance Ion Etching (RIE), (3) Palmtop surface mount system for micro devices, (4) Positioning-and-orientation miniature mechanism with large-deflective hinges, (5) Fast Atom Beam (FAB) process and its applications, etc.
