Abstract
In this paper, to realize handling of micro-parts, which size is smaller than 1mm cubic, the generating mechanism of sticking-force on micro-parts is analyzed. And using experimental apparatus and test micro-parts, the sticking-force is measured in an atmosphere. It is proved that the sticking-force P1 depends on the pressing-force which value is limited some by conditions. And using over limited pressing-force, the sticking-force P2 has a constant value. That force P2 is similar to the theoretical molecular force between silicone-part and silicone-plate. That force P2 depends on a perimeter of testing micro-part, however there is no pressing-force, the sticking-force P0 is independent of the scale factor.
