Abstract
LIGA process is one of the promising technologies for fabrication of extremely tall 3D microstructures with a large aspect ratio. Microstructures with height of over a few hundreds microns have been widely applied to various field such as micro-actuator, micro-mechanics, micro-sensor and so on. A key technology to realize a low cost in the LIGA process is the micro replication technology. Two kind of nickel molds,pole pattern having holes of a diameter 60μm, an aspect ratio of 1.0 beyond 65,000 in the are of 33×33mm^2, and hole pattern having columns which has the pattern dimension of the same as pole pattern mold. These were produced with X-ray lithography and nickel elect reforming process. In hot embossing in the atmosphere, an experiment of replication using PMMA succeeded.
