Abstract
In order to enable precise microfabrication with a high aspect ratio, the new replication technique which combined hot embossing and ultrasonic vibration was suggested. In this method, it is the feature to add vertical ultrasonic vibration to a metallic mold and a resin sheet in holding process after applying load. Consequently, it is promoted that plastic flows into the precise pattern of a metallic mold, and the accuracy of transfer improves remarkably. We tested using a Ni mold with micro-pattern, and polycarbonate. It turned out that contacting force became low and holding time was also sharply shortened compared with a conventional hot embossing technique.
