抄録
We have developed three port electromagnetic valve for micro reactor. This study aims at integrating the micro three port valve into micro reactor or several micro flow control systems. For that purpose we developed the micro three port valve with actuator mechanism. Electromagnetic actuators have big power in millimeter scale in general, and achieve high response speed. We designed and manufactured micro three port valve which has a moving part of magnet. We applied the developed valve to make slug flow (two-phase flow) by pouring two liquid into this valve's ports to realize efficient promoting chemical reaction.
