Generally, DLC films have good mechanical and tribological properties such as low friction coefficients, high wear resistance, and high hardness. And their mechanical properties can be varied widely by changing deposition conditions. However, they cannot be applied to machine elements such as gears, because their load capacities are not high enough for a high surface pressure. The present paper describes endurance performances of DLC films deposited POM gear pairs. POM is chemically stable, so that good adhesion of DLC films generally can not be obtained. Therefore, DLC films were deposited using PBIID (Plasma Based Ion Implantation and Deposition) Method under changing RF power and interlayers using HMDSO. As a result, DLC deposited POM gears had good endurance performances compared to no-DLC POM gear pairs.
