抄録
A laser processing is used for the micro-fabrication of the stent. Because processing heat causes recoagulation of molten material, it is necessary to remove it with another processing. Thus, it is required to improve the heat influence in the laser beam machining method In previous work, DEEL (Deep Electrochemical Etching with Laser assistance) was proposed, and demonstrated the possibility of the application. Currently, processing for φ5 mm tubes is succeeded by the DEEL. However, it was not possible to apply to capillary (less than 0.3mm).ln this research, DEEL processing for φ210μm tubes was performed. In this paper, applicability of DEEL processing for micro-tube and the effect of the processing condition on the product quality are reported.
