抄録
RF-MEMS(Radio Frequency-Micro Electro Mechanical System) switches have contact electrodes with a contact area of less than 0.1mm2 and contact load of under mN. Thus, it is difficult for the contact electrodes to establish low contact resistance, adhesion forces, and high durability of contact resistance. Carbon nanotube (CNT) films have low adhesion forces under micro-newton loads, and high electric conductivity. However, CNT films have high contact resistance. In order to use CNT films as RF-MEMS switches, it is necessary to reduce the high contact resistance. In this study, CNT films on silicon substrates were electroplated(copper, silver ,gold, platinum, rhodium) after gold evaporation in order to reduce the high resistance of CNT mms・ Contact resistances of the electroplated were measured. The plating on CNT films and reducing their contact resistances were successfully achieved, and the contact resistance was more stable than that of the metal plate.
