抄録
Amorphous Carbon Nitride (CNx) coating is promising for high hardness, low friction property and affordability. Though it is reported that transformed layer is important to show 10w friction, it is unclear that transformed layer makes an effect on low friction. To clarify the effect, we proposed the way to measure thickness, sp^2/sp^3 ratio and density of dangling bonds of transformed layer in-situ by using reflectance spectrometer while sliding.