マイクロスラリージェットエロージョン（MSE）法によるAlCrSiN傾斜膜の深さ方向強度特性評価

抄録

Several experimental techniques are ordinarily used to evaluate the strength properties of metal nitride coatings. However, for gradient coatings, in which the chemical composition changes gradually in the normal direction of depth relative to the surface, the properties at different depth positions of the gradient layer are difficult to evaluate. In this study, our previously developed micro slurry-jet erosion (MSE) test was applied to swiftly evaluate the strength properties of AlCrSiN gradient coating. Its coating had (Al+Si) concentration continuously increasing towards the surface. The MSE tests were conducted by impacting the slurry-jet containing 1.2 μm sized alumina particles perpendicular to the coated surface, and the depth profiles of the eroded surfaces were measured and the erosion rate were obtained. From the characterization by transmission electron microscopy and selected area diffraction, the change of the erosion rate was caused by forming nano-composites and also by segregation of a hexagonal closed-packed phase (hcp).