パラレルメカニズムを用いた高速・高精度3次元座標計測システム（第28報）

（冗長受動連鎖を用いた校正）

抄録

This paper deals with parameter identification for a three-degrees-of-freedom (3-DOF) parallel manipulator, based on measurement redundancy. A redundant passive chain with a displacement sensor connects the moving stage to the machine frame. The passive chain is sequentially placed in three directions at approximately right angles to one another to reliably detect the motion of the stage. Linear encoders measure changes in lengths of the passive chain and the three actuated chains of the manipulator during traveling of the moving stage. The least-squares method using a Jacobian matrix corrects 27 kinematic parameters so that the length errors of the passive chain are minimized. The above calculations were performed in both numerical simulations and experiments to investigate the effect of position angles of the passive chain on the parameter identification. Moreover, measurement experiments with gauge blocks and an optical flat were performed to verify the identified parameters.