ECF可変焦点形液体レンズの高速応答に関する研究

抄録

This paper presents varifocal liquid lens with integrated ECF micropump. ECF (electro-conjugate fluid) is a kind of dielectric and functional fluid generating strong jet flow (ECF jet) between electrodes surrounded by ECF, when high DC voltage is applied to the electrodes. Pressure by ECF jet changes the boundary geometry of the liquid lens based elastomer membrane. To increase the response time, we propose parallelized TPSEs for higher flow rate of the ECF micropump. We fabricated two kinds of ECF micropumps having 5 pairs of TPSEs in series: (a) 8 pairs in parallel; and (b) 24 pairs in parallel. The experimental results proved that the higher flow rate could be obtained in the parallelization of TPSEs which might have the potential to be adopted in the high-speed response of the ECF variable focus.