DLC膜のSi含有率が膜-PMMA固着界面の引きはがし強度に及ぼす影響

抄録

By applying a DLC film to the metal surface where the resin solidifies, the peeling strength of the solidified resin-metal interface is reduced. As part of investigating the reasons, we investigated the effect of the Si content in the Si-DLC film on the peeling strength at the interface between the film and PMMA and the amount of polar group on the resin-side peeled surface. As a result, it was found that the higher the Si content in the Si-DLC film, the lower the peeling strength. In addition, it was found from the IR absorption spectrum near the PMMA-side peeled surface that the C=O / C-C peak intensity ratio decreases with the increased Si content in the Si-DLC film.