抄録
Integrated piezo-electric ultrasonic wave transducer (IUT) which can be driven until about 600 degrees has been developed for high temperature nondestructive evaluation (NDE). To achieve fast NDE or NDE of rotating components, noncontact sensing is highly desirable. Actually, it would be useful if there is such a sensor could detect and receive an ultrasonic wave with more than 10cm-liftoff Then, non-contact sensing system based on the electromagnetic induction method using a commercial type ultrasonic transducer has been studied.
