J044071 薄膜金属ガラス・形状記憶合金アクチュエータ([J04407]知的材料・構造システム(7))
詳細
Shape memory alloy (SMA) microactuators have the potential to get large deformation and large force. In this research, we proposed a bilayer actuator using SMA and thin film metallic glass (TFMG) to get larger deformation than the previous SMA microactuators. The proposed actuator was fabricated by MEMS process including 3D forming process of TFMG. Driving characteristics were evaluated and then confirmed that the actuator achieved large deformation and large force.
