抄録
A microelectromechanical systems (MEMS) combined sensor measuring two-axis accelerations and an angular rate (rotation) has been developed for an electronic stability control system of automobiles. With the recent trend to mount the combined sensors in the engine compartment, the operation temperature range increased drastically, with the request of immunity to environmental disturbances such as vibration. In this paper, we report the combined sensor which has a gyroscopic part and two acceleration parts in single die. Especially, we focused on the structure design of the deformation-robust gyroscope which has three sets of symmetrically arranged folded beams as a main topic. The developed gyroscope has less than 0.6% temperature dependant variation of mode frequencies as well as less than 0.04% variation of the difference between driving and sensing mode frequencies.
