Abstract
Microstereolithography has been widely applied for a lot of applications such as photonics, MEMS and lab-on-a-chip. The remaining issues of microstereolithography are improvement of both throughput and material limitation. To overcome these issues, we have developed soft and hard molding processes based on one- and two-photon microstereolithography. By using the soft molding process with silicone mold, movable micromachines can be replicated. In addition, the hard molding using a polymeric mold can produce ceramic three-dimensional microdevices such as microchannels, scaffolds, and piezoelectric energy harvesters. These molding processes based on microstereolithography will be useful for mass production of practical devices using various kinds of ceramic materials.
