Abstract
Micro/nano tribology is the key to understanding tribological phenomena even at a large scale such as an automotive engine. Scanning probe microscopy (SPM) and computer simulations have driven the studies on micro/nano tribology for a couple of decades. Recently, microelectromechanical system (MEMS) technology is playing an important role in the research field. This paper describes the recent progress and future directions of micro/nano tribology conducted by the author. First, it is shown that the dominant factor of the friction coefficient between different kinds of metals is the difference in the interatomic difference. Second, 3D microstage and micro lateral force sensor are introduced. These micro devices enable the superior micro/nano tribology measurements by incorporated with AFM.Third, a novel nano-patterning method of nanostripe is described. The nanostripe has outstanding advantages when it isusd for a sliding surface because of the capability of self-repairing property.
