抄録
Power MEMS is defined as MEMS devices related to energy conversion in micro scale. After the investigation ofcoin-sized gas turbine engines at MIT, various attempts have been made toward high-added-value fuel-powered mobileenergy sources. Recently, energy harvesting, in which a small amount of electrical energy is extracted from thin energyexisting in the environment, attracts much attention, especially for battery-less wireless sensor network. In this report,recent development of MEMS technologies for micro energy systems is discussed.
