This paper reports a cantilever type SiO2 electret on comb-drive actuator, which is aimed at low frequency and large vibrational amplitude. The model of cantilever type electret device has comb-electrode at the tip and the end of the cantilever. Electrical equivalent circuit was prepared and SPICE simulation was run. Output voltage of 30 Vpp and output power of 227 (μW at the resonance frequency of 212 Hz was obtained under the conditions of charged voltage of 200 V, external force of 1 GN, load resistance of 1 MΩ2 and quality factor of 500.
