年次大会
Online ISSN : 2424-2667
ISSN-L : 2424-2667
セッションID: J161015
会議情報
J161015 MEMSアクチュエータ用薄膜ポリイミドダイアプラムの熱による駆動法と変位特性
三藤 慎一朗安達 興史月岡 達規今井 郷充
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会議録・要旨集 フリー

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抄録
A thin-film polyimide diaphragm for a MEMS actuator was fabricated and its process and mechanical characteristics were investigated. Owing to its low elastic modulus and the thin-film process, a thin-film polyimide diaphragm has a merit in terms of producing a large displacement. Given that merit, spin coating was used for forming a thin film of polyamide, and deep-RIE (Bosch process) was used for fabricating the diaphragm section of the actuator. Thin-film polyimide diaphragms with micrometer-order thickness were fabricated. To drive the diaphragm as an actuator, the following two methods were applied heat expansion by applying an electric current and volume expansion of a gas-liquid phase-change material confined in a cavity between polyimide diaphragms. As for the former method, an aluminum thin film is deposited on the diaphragm. As for the latter, paraffin (vaporized by heating) is used as the phase-change material Displacement characteristics for each method were revealed by the experiments. In the case of both methods, displacements of tens of micrometers were outputted. Experiments of driving actuator confirmed that the proposed systems work as actuators. The actuators developed in this research are applicable to micro-pumps for medical and other uses.
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© 2012 一般社団法人 日本機械学会
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