抄録
This paper presents the fabrication of dual cantilever with sputtered magneto-strictive film (FePd alloy, 0.4＼μm thick). The dual cantilever with FePd film was successfully fabricated by FePd lift-off patterning and MEMS fabrication techniques. The fabricated dual cantilever was able to be independently deflected by applying magnetic flux. The deflection of cantilever was 1.4μm at 300 Gauss due to an effect of magnetic flux. In addition, narrow gapped dual needle tip was fabricated using a novel self-align process, including Si trench etching, side wall protection, mechanical polishing and Si crystalline anisotropy etching. A sharp dual Si tip with a gap of about 500nm was successfully Fabricated.
