抄録
Metallic glasses are the promising metallic materials for thermal nanoimprinting because of their amorphous structure and nanometer-scale homogeneity. Nanoimprinting is expected for mass producing technique for nanodevices such as a bit patterned media (BPM). The BPM with a recording density of 2 Tbit/in.^2 is required to array magnetic bits with a pitch of 18 nm and a diameter of 9 nm. Therefore, we aimed to investigate nanoimprintability of metallic glass in ultrafine scale of sub-10 nm. We have developed nanoimprinting molds having nanodot arrays with 33- and 25-nm pitches, and nanoimprinted metallic glass with the fabricated mold. In the results, the flow distance of metallic glass into the gap of dot arrays was decreased with decreasing the gap width from 34 nm to 7 nm. A viscous flow simulation associated with interfacial effect was attempted to investigate the scale effect of the flow distance. In the results, the wettability of metallic glass on mold materials was revealed as a critical factor of nanoformability in the ultrafine scale.
