抄録
To realize a sensor that monitors moisture-in-oil, it is required a nanoporous thin film to separate water moleculars from oil. In this paper, we propose nanoporous thin films by utilizing dealloying behavior of dual-phase alloy in an acidic solution. Dealloying behavior is selective chemical etching process some of the most intricate and random three-dimensional morphologies. Using this dealloyed nanoporous thin film as an upper electrode of sensor, we produce a moisture-in-oil sensor that has an outstanding resistance for environment. Nanoporous Cr thin films were prepared by sputtering Cu and Cr, followed by annealing and dealloying. The nanoporous Cr thin films had pores ranging from about 200 nm to 300 nm and thicknesses about 1.0 μm.
