抄録
Since gas flows in micro/nano devices are dominated by the interaction of gas molecules and solid surfaces, the detailed understanding of the scattering dynamics of gas molecules on surfaces is one of the critical issues for optimizing the performance of these devices. The molecular beam technique is a powerful tool to analyze gas耀urface interactions. In this paper, some of our studies on gas-surface interactions by means of the molecular beam technique are briefly presented. The first topic is the scattering of water molecules on graphite surface, where the relatively large adsorption energy has a significant impact on the scattering dynamics. The second topic is the application of vertically aligned single-walled carbon nanotubes (VA-SWNTs) as surface modification material to enhance the energy accommodation of gas molecules on surfaces. The unique morphology of VA-SWNTs with high porosity allows gas molecules to penetrate into the films and realizes a large number of collisions with SWNTs.
