F221003 In-SEM Indenter technique which achieves simultaneous measurement the Nano indentation test and SEM observation

Abstract

The Nano Indentation has measurement error which caused by the Pile-Up and the Sink-In. Because it is difficult to interpret the existence of the Pile-Up and the Sink-In using the Nano Indentation test results. Recently, it is possible to observe the Pile-Up and the Sink-In using simultaneous measurement the Nano indentation test and SEM observation. This technique could be applied to in-situ observation of the nano structure crushing by the Nano Indentation. In this study, we showed the availability of the In-SEM indenter technique for nano structure.