Abstract
Silicon plate of thickness 100μm has a characteristic of flexible bending, and thus, new added value can be provided. In this study, we investigated a new horizontal pulling method using surface tension because the production less than 100μm were difficult by conventional methods. We draw solidified thin plate from a slit of the crucible. This experiment is a model experiment using the metal with low melting temperature. As a result, we succeeded in obtaining stable thickness of 200mm. In this experiment, the slit width (=metal plate width) was 20mm. In this study, we investigated how the slit width change will affect the melt temperature at the slit, which is the most important parameter in the process.
