Abstract
Nowadays thin films are essential materials for modem engineering, and the demand for high quality thin films is getting larger. Understanding the dynamics of initial growth mechanism during deposition is important to control the quality of films. In this research, we monitored the structure evolution of thin film during and after deposition by using antenna transmission acoustic resonance (ATAR) method. We observed the structure evolutions from island structure to continuous film and vice versa. During deposition, structure changed from island structure to continuous film. However, by increasing the temperature, continuous film changed to island structure. We thus succeeded to monitor the structural evolution by temperature variation.
