抄録
Along with the development of microtechnology, the gas-surface interaction becomes important due to large surface area-to-volume ratio in micro-scale flows. As a parameter on gas-surface interaction related to a flow rate, Tangential Momentum Accommodation Efficient (TMAC) is often employed. TMAC represents the degree on tangential momentum exchange between molecule and surface. In this study, TMAC was measured for several gas species to investigate the characteristics on gas properties. The constant-volume technique was employed for measuring the mass flow rate through a microchannel. Monatomic gases of helium, argon and xenon were employed as test gases. The microchannel was made of Fused Silica as non-metal material. TMAC was calculated by comparing the measured mass flow rate and the theoretical one with the second order slip boundary condition. The obtained results suggested that the molecular weight has only small influence on TMAC.
