抄録
This paper reports a electrostatic liner actuator by electret MEMS. The actuator is three-terminal comb-drive actuator. The displacement of the comb-drive actuator by applied voltage is parabolic function in general. However, the displacement become liner by electret MEMS of which a electret film is formed on one comb electrode because the second-order term of the displacement is cancel between the electret electrode and the non-electret.
