J2240402 Tensile test of FIB-fabricated cemented carbide specimens and their mechanical properties

Abstract

Cemented carbide is typically used as material for working tool because it has superior characteristics, such as very high Young's modulus, excellent rigidity, good chemical inertness, and good thermal stability. This research focuses on investigating the possibility of WC-Co cemented carbide as structural material in MEMS. WC-Co cemented carbide nanowires (NWs) are prepared using focused ion beam (FIB) fabrication technique. The NWs are tensioned using a MEMS tensile test device that we have developed. The Young's modulus and fracture strength are affected by sample size, WC-to-Co ratio, and the WC-Co interface angle to tensile direction.