S1310205 リニアモータ駆動XYステージにおけるセンサレス工具接触検知技術([S131-02]先進工作機械技術(2),生産加工・工作機械部門)

抄録

In ultra-precision machining including micro milling, a contact point between tool edge and workpiece needs to be set accurately to suppress the machining error. Conventionally, it is detected by using external sensors and devices such as acoustic emission sensors, CCD cameras, and so on. However, detection by using external sensors and devices depends on the operator's skill. In addition, automation of the contact detection is required to reduce detection time. We proposed a sensor-less tool contact detection method based on disturbance observer technique and verified the effectiveness of this method by conducting the tool contact detection tests in z direction. To realize accurate tool contact detection in micro milling, it is needed to set up workpirce coordinate on machine tools accurately not only z direction but also x and y direction. Therefore, in this research, we applied the proposed method to the linear motor driving xy stage and evaluated the performance of this method in x and y direction.