Abstract
In this paper, we examined the processing characteristics of the cast iron plate and the urethane resin porous polishing pads. The similarities between the cast iron lapping plate and the porous urethane resin polishing pad are described. It was known that the conditioning state of tool surface affects the processing characteristics greatly. To improve the performance of conventional tools, we developed the metallic fiber lapping tools and the epoxy resin pads. The metallic fiber tool can grip the abrasives on the lapping area with microasperity. The epoxy resin polishing pad showed higher removal rate and lower surface roughness than a conventional urethane resin polishing pad, because of high hydrophilic property.
