抄録
We examined the friction properties of the nanostripe structures under dry conditions. The nanostripe structure had multilayer film consisting of soft metal (Ag) and hard metal (Cr) that was deposited on a micron scale slope array on a Si substrate. The thickness of each film was ranged from approximately 20 nm to 180 nm. We measured the friction force on the nanostripe structures by rubbing with six kinds of slider (Mo/Ni/Ti pin, SUJ2/Al_2O_3/Si_3N_4 ball) using a reciprocating friction tester. The specific wear rate was examined from the depth of wear track on the nanostripe structure that was measured by laser microscope. The nanostripe structures showed stable friction coefficients of about between 0.2 and 0.3 in a vacuum (2×10^<-4>Pa). When increasing the thickness ratio of Cr, the friction coefficient became more stable and the wear rate decreased.
