Abstract
We have studied simulation method for surface-diffusion-driven evolution of high-aspect-ratio hole patterns. In order to reproduce the topological changes such as closure of hole openings and pinch-off of voids in the evolution of high-aspect-ratio hole patterns by simulation, phase field model based on Cahn-Hilliard equation with degenerate mobility is used. We show that our simulation reproduces well the observed evolution of high-aspect-ratio hole patterns. We also reveal the capability of the surface-diffusion-driven evolution to create different kinds of 3D micro-structures such as beams and cantilevers using this simulation.
